Description |
Grade Impurities (Liquid) |
Electronic 99.95% (N3.5) (Mol. PPM) |
VLSI 99.995% (N4.5) (Mol. PPM) |
Sigma 3 99.9995% (N5.5) (Mol. PPM) |
Hydrogen Bromide is a colourless, toxic and corrosive gas at atmospheric pressure and room temperature. It is heavier than air, and fumes in moist air. |
Nitrogen |
< 320 |
< 13 |
< 2 |
Oxygen |
< 80 |
< 6 |
< 1 |
THC |
- |
< 5 |
< 1 |
Carbon Dioxide |
< 10 |
< 8 |
< 3 |
Moisture |
< 5 |
< 3 |
< 1 |
Carbon Monoxide |
< 10 |
< 2 |
< 1 |
Total Metals |
- |
< 10 ppmw |
< 0.5 ppmw |
Iron (Fe) |
- |
< 10 ppmw |
< 0.1 ppmw |
Nickel (Ni) |
- |
- |
< 0.05 ppmw |
Chromium (Cr) |
- |
- |
< 0.05 ppmw |
Other Metals 1 |
- |
- |
< 0.01 ppmw |
1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn |
Cylinder Size |
Volume (Kg) |
B10st |
45.5 |
B50st |
51.7 |
Cylinder Data |
Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / Volumes as listed -
Larger volumes are available on request.
|
Deluxe GAS can supply any internationally recognised valve type. For Hydrogen Bromide the standard internationalvalve types are as follows |
American |
CGA 330 / DISS 634 |
European |
DIN 477 - 8 |
Gas Data |
Mol. Weight |
36.461 |
Boiling Point |
-85°C |
Density |
1.5 g/cm3 |
Vapour Pressure |
41.7 bar |
Recommended Regulator
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Typical Applications
Etching of native oxide prior to epitaxial deposition : CVD reactor cleaning, moisture scavenger in CVD oxides.