Description |
Grade Impurities (Lquid Phase) |
99.999% (N5.0) (Vol. PPM) |
At room temperature silicon Terachloride is a colourless, non flammable, corrosive liquid. |
Donors (P, As, Sb) |
< 3 ppba |
Boron |
< 0.1 ppba |
Aluminium |
< 0.003 ppba |
Hydrocarbons |
< 0.1 ppmw |
Carbon |
< 0.3 ppma |
Trichlorosilane |
< 100 ppmw |
Cylinder Size |
Volume (Kg) |
B10st |
up to 12 |
B50st |
up to 60 |
Cylinder Data |
Supplied as a liquefied gas in seamless steel cylinders.
Standard sizes / Volumes as listed -
Larger volumes available on request.
|
Deluxe GAS can supply any internationally recognised valve type. For Tetrachloride the standard international valve types are as follows |
American |
CGA 330 / DISS 636 |
European |
DIN 477 - 8 |
Gas Data |
Mol. Weight |
169.9 |
Boiling Point |
57.6°C |
Density |
1.483 kg/m 3 |
Vapour Pressure |
0.2 bar |
Recommended Regulator
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Typical Applications
Used to plama etch metals and in epitaxial silicon applications.