Description |
Grade Impurities Gas Phase) |
VLSI 99.9998% (N5.8) (Vol. PPM) |
Colourless, flammable, highly toxic gas with an odour of decaying fish. |
Argon + Oxygen |
< 1 |
Arsine |
< 1 |
Methane |
< 0.5 |
Carbon Monoxide |
< 0.5 |
Carbon Dioxide |
< 0.5 |
Moisture |
< 1 |
Nitrogen |
< 1 |
Cylinder Size |
Volume (Kg) |
B44st (A) |
12.3 |
B50st |
13.9 |
Cylinder Data |
Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinder.
Standard sizes / Volumes as listed -
Smaller volumes are available on request.
|
Deluxe GAS can supply any internationally recognised valve type. For Phosphine the standard international valve types are as follows |
American |
CGA 350 / DISS 632 |
European |
DIN 477 - 1 |
Gas Data |
Mol. Weight |
33.997 |
Boiling Point |
-87.7°C |
Density |
1.40 kg/m 3 |
Vapour Pressure |
41.9 bar |
Recommended Regulator
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Typical Applications
Used as a dopant in metal / polysilicon dielectrics.