Description |
Grade Impurities (Lquid Phase) |
MEGA 99.998% (N4.8) (Mol. PPM) |
Electronic 99.999% (N5.0) (Mol. PPM) |
Sulphur Hexafluoride is a non-flammable, colourless, odourless gas. |
Nitrogen |
< 5 |
< 1 |
Oxygen |
< 5 |
< 0.5 |
Halocarbon 14 |
< 5 |
< 3 |
Moisture |
< 2 |
< 0.3 |
Hydrogen Flouride |
< 0.1 |
< 0.1 |
Cylinder Size |
Volume (Kg) |
B10st |
10 |
B44st (A) |
45.8 |
B50st |
52 |
Cylinder Data |
Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders.
Standard sizes / Volumes as listed -
Larger volumes available on request.
|
Deluxe GAS can supply any internationally recognised valve type. For Sulphur Hexaflouride the standard international valve types are as follows |
American |
CGA 590 / DISS 716 |
European |
DIN 477 - 6 |
Gas Data |
Mol. Weight |
146 |
Boiling Point |
-63.7°C |
Density |
0.736 kg/m 3 |
Vapour Pressure |
21 bar |
Recommended Regulator
Single stage brass or stainless steel body with stainless steel internals.
Deluxe GAS has a variety of suitable handling equipment for this product - please enquire.
Typical Applications
Used in the dry etching of films.